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Feature article Think Small! issue 2, Volume 2:

Taking the pulse of the MEMS industry

by Jérémie Bouchaud

WTC has recently taken the pulse of the mems industry to answer the question: just how healthy is the industry? Over the period of February to March 2007 wtc carried out a global bottom-up survey of the top 60 mems companies, examining for each company the current mems revenues, products, applications and views on the major changes taking place in the industry.
This article showcases the major findings from the survey. Key features are the two rankings, mems30 and mems10 foundries, and the total 2006 market based on shipments.
Texas Instruments still leads the pack by a big margin with its dlp chips. TI established a newrecord in 2006 with turnover of $905m. Following a 8% dip in revenues in 2005, its dlp revenue was up 15% last year. The company’s front projector business remains the main revenue driver. However, wtc expects that its tv business will continue to suffer from lcd and plasma competition.

Inkjet print heads still contribute greatly to overall MEMS revenues. Five companies in the top ten: HP (#2), Canon (#3), Lexmark (#5) and Seiko Epson (#6) with their own print head production, and STMicroelectronics (#7) as a major foundry partner for hp. The automotive sector is the next major revenue source. Bosch (#4) clearly heads the pack with estimated MEMS revenues of $374m. It is trailed by nine further companies jostling for position between Freescale (#10) with estimated $200m and Panasonic (#19) with estimated $102m. Both gyroscopes and accelerometers for Electronic Stabilisation Programmes (ESP) and pressure sensors for Tire Pressure Monitoring Systems (TPMS) were major stimulants for the growth of the automotive mems markets in 2006.

Newcomers to the top 30

     FormFactor (#9), a manufacturer of MEMS-based wafer probes cards, exploded onto the market just four years ago. Its revenues have grown 55% in 2006 to reach estimated $247m.
     FLIR Systems (#25) with estimated $50m is the leader of the fast growing market for microbolometers typically used in industrial, security and emerging automotive applications.
     Melexis
(#30) sold in 2006 estimated $28m worth of MEMS sensors such as pressure sensors for automotive applications. Its product palette is expanding fast and includes infrared sensors for luxury cars and more recently gyroscopes.
Two additional companies must be highlighted as a result of impressive growth. Avago Technologies (#8) consolidates its clear leadership in the fbar duplexers and filter business for cell phones. After selling 100 million FBAR products in 2005, it shipped 220 million duplexers in 2006 and doubled revenues to reach rank 8 with $255m. In a similar fashion, Knowles Acoustics (#21) shipped 200 million mems microphones and confirmed its clear leadership in this sector, doubling its estimated revenues to $92m.

Inkjet heads amount to 30% of MEMS market

The inkjet market is still the largest with 30% share of the overall MEMS market. However, from the point of view of the mems component it is a stagnating market, with the industry moving away from disposable mems print heads and most new printers featuring a fixed print head. This is manifesting itself in slow growth in this sector.
Although the four biggies have been left alone for years in this very profitable market, things are changing with a series of new players trying to get their share of the pie (see MEMS news p. 5). Kodak will enter the market this year, leveraging its "photography" brand to establish itself on the high end segment of digital photo printing (see February issue of Think Small!).

Pressure and flow sensors

Pressure and flow sensors make up a fifth of the MEMS market. Industrial and automotive applications are neck and neck in revenue.The industrial share is big because of the high price of the package. Honeywell (#17) and GE (#15) dominate this market together with other large companies such as Danfoss, that buy pressure sensor dies and package them. The automotive market for pressure and flow sensors is propelled by TPMS, which will be mandatory this year in the US.

Inertial sensors

Inertial sensors are neck and next with $1220m. Consumer applications grow fast with use in cell phones and gaming, however automotive still clearly dominate with 70% of the revenue. Contrary to what we expected two years ago, the airbag market is not completely saturated and keeps growing thanks to new markets, e.g. India and China. Unsophisticated sensors, like in the early 1990s, fit in cars costing typically $3000. In developed countries, gyroscopes for esp drive the market growth and will still do so in the next four years. Indeed, penetration will grow from 25% in the us today to nearly 100% in the US in 2010 due to a new ESP regulation.

MOEMS

MOEMS for displays and telecom applications are the fourth largest mems segment, mainly because of dlp. WTC expects ti’s revenue in dlp to surpass the $1bn mark in 2007 for the first time. MOEMS for telecom applications experienced healthy growth in 2006, as companies are benefiting from investment in fiber optical metropolitan networks e.g. from British Telecom and Verizon. As the price of copper cabling rises, it makes fiber optical networks more and more attractive. Mems foundries such as Memscap, Micralyne and Silex and specialized start-ups like Dicon are also profiting from the recovery.

BioMEMS

WTC has divided bioMEMS into two separate categories, microfluidic chips in silicon, polymer and glas, and drug delivery systems. There is a nice niche market for mems foundries in drug discovery. However a mass market for microfluidic chips for point-of-care applications has not yet materialized because of barriers from health insurance systems and medical doctors. There are some notable exceptions such as I-Stat blood gas monitors, but a mass market is not expected for at least another three years.
On the other hand, things are moving rapidly in the drug delivery market (see the Microsystem news section on page 4). Böhringer Microparts (#22) has already reached a turnover of $90m in 2006 with its nebuliser technology, although the product was only certified in Germany and for one medication. Revenue is expected to explode by 2010 for this product, as it will obtain certification for additional medications in more EU countries and in the USA.

RF MEMS

RF MEMS market earned $ 330m last year with three companies shipping fbar duplexers and filters in series: Avago, Infineon and EPCOS. It should be noted that Infineon’s share is underrepresented in the mems30 ranking since it sold mainly FBAR wafers, while the $330m corresponds to the value of first-level packaged duplexers and filters. MEMS oscillators just started at the end of 2006 with the first million shipments by SiTime. Seiko Epson also started to ship its QMEMS oscillators. RF MEMS switches were only in the sampling phase in 2006 (e.g. at Teravicta and Panasonic), but are now jolting the market with Teravicta shipping 10,000 units per month, and plans to reach the million mark by the end of 2007.
 

Frequently Asked Questions about the mems30

Why are some of the well-known pressure sensor companies absent
from the ranking?
Concerning the large pressure sensor manufacturers that supply industrial and medical applications, most of them (Danfoss, All sensors, Emerson etc) buy the MEMS die and package it, which is why WTC did not count them. Other large pressure sensor suppliers, such as Wika and Huba, produce capacitive ceramic sensors, not MEMS sensors. WTC also checked Sensata (formerly part of TI), and the vast majority of their pressure sensor revenue was with ceramic capacitive sensors, only few of their products are MEMS-based. WTC also investigated Endevco and Grundfos but they did not make it into the mems30 in 2006. WTC believes to have all the other signficant ones in mems30: Honeywell, Bosch, Infineon, Freescale, Denso, Delphi, Melexis, Kavlico (part of Schneider), and GE.

You must have underestimated the revenue for Bosch. They announced MEMS revenues above $1B in a presentation recently.

All our figures concerned first level packaged components. When Bosch communicates about their MEMS revenues, they count for some products the value of the modules (such as ESP), which have a much higher value than the sensors components. We validated with Bosch our figure for shipments in units for accelero (differentiating low and high g), pressure (differentiating MAP BAP etc), flow and gyros. We also know the ASP for these components. They confirmed that our estimate is very close when considering 1st level packaged components.

Why are some revenues so different than in the ranking from other analysts?
We saw the rankings from others. Especially for HP, Avago and FormFactor there are strong divergences.
    HP is outsourcing more than half of its printhead production, mostly to STMicroelectronics. WTC counted only the printheads which HP does manufacture in its own two fabs in the US and in Singapore. In other rankings, either there is some double counting or the outsourced part is underesimated.
    WTC validated with Avago and its competitors its figure for shipments and price in units by type of FBAR products (Duplexer for the PCS band, Quintplexers and CDMA filters). It is easy to get misled by the different ways Avago and Infineon communicate their shipments. Infineon counts FBAR dies, whereas Avago counts FBAR products: a filter has one die only, but a duplexer consists of two FBAR dies and a Quintplexer of five. This can lead to major misunderstandings.
    Concerning FormFactor, WTC's first estimate was already higher than the one of other analysts, yet one can notice that WTC has even increased its original estimate. FormFactor publishes its total revenue ($369m), but the MEMS value of their probe cards was unclear. WTC discussed in more detail with FormFactor. The main share of their costs/revenues lies in the MEMS, in which a typical MEMS probe card for DRAM testing contains 26,000 micromachined contacts. WTC revised and validated its estimate with FormFactor, and is now very confident with its figure.

Adding the revenues of the mems30 comes way short of the market numbers in the Nexus report . Where are all the billions of dollars?

There are two main reasons for the discrepancy:
1. The mems30 does not include readwrite heads manufacturers. RW heads were traditionally counted as microsystem in the NEXUS report and accounted for half of the total market.
2. When we estimate the total market size, we consider the value of 1st level packaged components for all products. In the mems30 ranking, if a company ships only wafers or dies , which is often the case for pressure sensors for example, we count only their revenue with wafers or dies which is of course a fraction of the value of 1st level packaged components.

mems10 foundries

WTC's mems10 foundries ranking includes contract manufacturers specializing in mems or having MEMS as a majority business, including Dalsa where MEMS exceeded CMOS in their foundry revenue in 2006 for the first time, but excluding STMicroelectronics foundry activities for hp and Sony for Knowles. Several mems foundries including Olympus, Semefab and Microfab Bremen are chasing hard on the tail of Touch Micro-system Technology (TMT) with revenues estimated between $5m and $7m.
    The group of top ten foundries reflects different realities. One can first distinguish the foundries specializing in high value products, such as telecom infrastructures, biomedical, aerospace and energy. These are typically IMT, Micralyne, Silex, Colibrys, Memscap and Tronic’s. On the other hand some like APM, Dalsa, TMT and X-Fab focus on high volume applications in automotive, inkjet, or even consumer business. The border becomes blurred sometimes as Silex expands to 8", and Memscap grows in the microphone business.
   One can also differentiate the companies shipping wafers (most foundries), and the ones which offer packaged products or full modules as a way to increase margins and lower customer volatility, such as Tronics, Colibrys and Memscap.
    Finally, few of these foundries have a range of standard products in parallel to foundry services. This is the case for Colibrys and Memscap, and more recently Microfab with their own pressure sensor product line. This is a way to increase revenue, but also to become more independent from the customer. This is not, however, a general trend in the MEMS foundry business. Most prefer to remain a pure foundry player to avoid frightening their customers. APM, for example, spun out its standard product business in February.

Is contract manufacturing a profitable business?

The total revenue for MEMS contract manufacturing from the mems10 foundries list reached estimated $131m in 2006, as the business swelled to a 30% increase last year.

IMT overtook APM as the leading MEMS foundry with an impressive leap from estimated $13m to estimated $21m based on contract manufacturing of infrared sensors, MOEMS and DC switch arrays for telecom applications.
Silex enjoyed the largest boost, doubling its revenues to estimated $13m in 2006, largely from sales increases in life science and telecom applications.
The foundry business in not only expanding but also profiting. In the past, Micralyne and Memscap were one of the few companies writing black numbers in the market, however, several companies started to reach profitability on a monthly or quarterly basis in 2005. Furthermore, companies such as Tronic's, Silex, TMT and others experienced profitability throughout 2006. The pipeline of the mems10 foundries is well nourished and should allow for a healthy growth in the next two years.
While most foundries had typically three to five products in serial production in 2006, two to three additional products will emerge for each company in 2007 and another 15 to 60 additional customers are in the R&D phase.

Telecom and biomedical are driving growth of foundries

In terms of mems applications, automotive dominates today due to Dalsa's production of pressure sensors for Freescale, in addition to some activity at APM, TMT and X-Fab. The most significant growth last year was due to telecom infrastructures and bio-medical applications. In optical telecom, MOEMS products, that have been ready for 4–5 years now, are going into production as the demand materializes.
In a similar fashion, big pharma companies, that have been "playing" with microfluidics for two or three years now, are subcontracting production at mems foundries, especially for drug discovery.
In the future, what will be the major propellers for mems foundry business by 2010? Without surprise, the Taiwanese foundries APM, TMT and TSMC expect significant opportunities from Consumer Electronics. But also Silex, Memscap and X-Fab bet on consumer electronics e.g. for contract manufacturing of MEMS microphones. The other foundries, more specialized on high value markets, will consolidate their position in telecom, biomedical, energy, and aerospace and defence.

Limited outsourcing for automotive MEMS

   What about automotive? Contrary to other analysts’ opinions, WTC does not believe that subsystem and component manufacturers will systematically externalize the mems component manufacturing in the future. The investment of Bosch in a 8" fab is a clear sign. The partnership between Dalsa and Freescale only concerns some of the old pressure sensor technology. Freescale will keep the leading edge accelerometer and gyroscope technologies in-house. Most automotive mems manufacturers have investigated this “make or buy” concept and come to the conclusion that it is not more profitable to externalize fab activities.
    Opportunities exist, however, for mems foundries in special cases. When considering to convert to 8" wafers some automotive mems suppliers will choose to use an external foundry already running 8" wafers, instead of building an expensive new fab. Also after buyouts and mergers, when a pure system company inherits a mems components production, this might also be externalised to a MEMS foundry.

Optimistic outlook for foundry business

    To summarize, the outlook is now good for pure MEMS foundries. They all expect significant growth of their businesses in 2007 (at least 30%), as well as several are expanding capacities. TMT tis currently the only 8" foundry in the mems10, but APM and Silex will soon join in the next two years.
   One should also mention larger semiconductor companies like STMicroelectronics and Sony Semiconductor Kyushu Corp (SCK). In contrast to the mems10 foundries which serve from 15 to 60 customers, these companies' MEMS foundry activity is usually focused on a key customer. STMicroelectronics has a strategic relationship with HP for the production of print-head wafers, while SCK is the prime MEMS wafer supplier for Knowles acoustics. Although MEMS is a very small part of the activity, these players actually dominate the mems foundry business in revenue terms. WTC estimates that the MEMS foundry revenues from STMicroelectronics and SCK to be around $240m and $35m, respectively.

In conclusion, WTC says: The pulse of the MEMS industry is beating fast

   The big players are alive and well, especially ti at #1, with DLP revenues recovering after a drop in 2005. The smaller players, such as the foundry companies, are starting to be profitable. Automotive application remains the major engine for growth and innovation in mems. RF and optical MEMS for telecom applications are taking off. Consumer electronics is still young, yet it already makes up for 10% of the MEMS market and contributed significantly to the revenues of seven of the top 30 players in 2006. Consumer applications are not only driving market growth, but also stimulating technological breakthroughs in the front and back end. These breakthroughs are essential for beating the extreme price pressures that go along with this new mass market.

The full results of the survey are available to you in the new Custom Market Technology Briefing from WTC:
MEMS industry 2007–2011: status, trends and strategies