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Think Small! issue 4, volume 1 (October 2006):
Has the time come for MEMS oscillators?

A flurry of announcements during the year have resurrected interest in rf mems oscillators. Wtc believes that these devices have a nice future, but warns of some confusion and inflated expectations.

MEMS oscillators are nothing new. The first publications mentioning rf mems resonators for oscillator applications appeared in the 1980s. Until recently however, the low temperature stability of silicon and the need for expensive ceramic or metal vacuum packaging prevented mems from becoming a serious alternative to quartz.

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